研究活動
 
ECF マイクロアクチュエータ
 
 
粒子分散系 ERFバルブ

MicroValves using Homogenious-type ERF

Micro homogenious-type ERF valve by discharge machining

Micro valves using Homogenious-type ERF are proposed and developed, as an advanced control component for practical micromachines using fluid power in millimeter size. Firstly, to investigate an ER effect in micro size, several 2-port micro ER valves with different electrode gap lengths are fabricated and tested. Secondly, a 3-port micro ER valves, which are fabricated by both of coventional machine tool and MEMS technologies, are fabricated and the static and dynamic characteristics are experimentally investigated. The validity of two kinds of the micro ER valves are confirmed by applying to position control of a bellows microactuator.

 
Principle of the Homogenious-type ERF valves
Micro homogenious-type ERF valve by MEMS
 
Actuator integrated Micro homogenious-type ERF valve by MEMS for driving a gripper
A micro gripper driven by micro ERF 3-port valve
Research Activities
(1) Kazuhiro YOSHIDA, Ken TAKAHASHI, Shinichi YOKOTA, : In-pipe Mobile Micromachine Using Fluid Power Adaptable to Pipe Diameters, Journal of Robotics and Mechatronics, Vol.11, No.5, pp.417/422, (1999)
(2) Kazuhiro YOSHIDA, Ken TAKAHASHI, Shinichi YOKOTA, : In-pipe Mobile Micromachine Using Fluid Power (A Mechanism Adaptable to Pipe Diameters), JSME International Journal, Vol.43, Ser.B, No.1, pp.29/35, (2000)
(3) Jun-ho PARK, Shinichi YOKOTA, Kazuhiro YOSHIDA : Micro Fluid Control System Using Homogeneous ER Fluid (Proposition of micro ER valve and basic experiments), Proc. of FLUCOME, Canada, (2000)
(4) Jun-ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA : Micro ER Valve Using Homogeneous ER Fluid and its Applications to Micro Fluid Control System, Proc. of IECON-2000; 26th Annual Conference of the IEEE Industrial Electronics Society, Nagoya, pp.1809/1814, (2000)
(5) Kazuhiro YOSHIDA, Masaaki KIKUCHI, Jung-Ho PARK, Shinichi YOKOTA : A Micro ER Valve Fabricated by Micromachining, IEEE Micro Electro Mechanical Systems Conference Technical Digest, pp.467/470, (2001)
(6) Kazuhiro YOSHIDA, Jung-Ho PARK, Takayuki SHIMIZU, Shinichi YOKOTA : A Micropump-Mounted In-Pipe Mobile Micromachine Using Homogeneous Electro-Rheological Fluid, Proc. of The 3rd. IFToMM International Micromechanisms Symposium, pp.2/7, (2001)
(7) Kazuhiro YOSHIDA,Masaaki KIKUCHI, Jun-ho PARK, Shinichi YOKOTA : Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments, Journal of Sensors and Actuators, Vol.95/2-3, pp.227/233, (2002)
(8) Kazuhiro YOSHIDA, Takayuki SHIMIZU, and Shinichi YOKOTA: Development of an In-Pipe Mobile Micromachine Using Homogeneous ER Fluid, Proc. of the 1st Taiwan-Japan Workshop on Mechanical and Aerospace Engineering, Vol.3, pp.871/882, (2001)
(9) Kazuhiro Yoshida, Hiroshi Yano, Jung-Ho Park, Shinichi Yokota: A Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid, Proc. of Mechatronics 2002, Holland, pp.725/734, (2002)
(10) Kazuhiro Yoshida, Hiroshi Yano, Jung-Ho Park, Shinichi Yokota: A valve-integrated microactuator using homogeneous electro-rheological fluid, the Journal of Robotics and Mechatronics, Vol.15, No.2, pp.244/250, (2003)
(11) Kazuhiro Yoshida, Hiroshi Yano, Jung-Ho PARK, and Shinichi Yokota: A Valve-integrated Microactuator Using Homogeneous ER Fluid, Proc. of the Fourth International Symposium on Fluid Power Transmission and Control (ISFP’2003), Wuhan, China, pp.542/547, (2003)
(12) Kazuhiro Yoshida, Jung-Ho Park, Hiroshi Yano, Shinichi Yokota and Sonam Yun : A Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid, Journal of Sensors & Materials, Vol.17, No.3, pp.97/112, (2005)
(13) M. de Volder, K. Yoshida, S. Yokota, D. Reynaerts: Electrorheologic Liquid Crystals in Microsystems: Model and Measurements, The First Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2006(1-st IEEE-NEMS 2006), Zhuhai, China (2006) January Best Student Paper Award
(14) Micheal de Volder, K. Yoshida, S. Yokota, D. Reynaerts: On the use of liquid crystals as electrorhelogical fluids in microsystems: model and measurements, Journal of Micromechanics and Microengineering, Vol.16, pp.612/619, (2006)
(15) Kazuhiro Yoshida, Joon-wan Kim, Kumiko Kohda, Shinichi Yokota: Flexible Electro-rheological (ER) Microvalve Based on Flexible SU-8 Cantilever Structures, ICMT06, Mexicocity CD-rom, (2006)

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