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In micro systems like in-pipe micro-machines, it is required to develop powerful mcro actuators for realizing practical works. Fluid power system has a potential to develop active and functional components in the field of micro-machines. From the view point of the powerful micro actuators for advanced micro fluid control systems, we have an interest in developing advanced fluid control lements like micro valves, micro motors and micro pumps by making use of functional fluids like ERF, MRF and ECF.

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ECF マイクロモータ ECF マイクロアクチュエータ ECF ポンプ ERF バルブ
ERF マイクロバルブ マイクロマシン MRF バルブ MRFマイクロバルブ
マイクロポンプ センサ マニピュレータ CPS システム

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Yoshida-Kim Laboratory