Flexible ER microvalve (FERV)
Flexible ER microvalves (FERVs) have been proposed and developed. The FERV controls ERF flow by changing its apparent viscosity due to the applied electric field. The FERV have been proposed, fabricated by using advanced and MEMS technologies, and applied to soft microgripper, etc.
 |
 |
| Soft ER microgrpper |
Soft microgriper using FERVs fabricated by machining42) |
|
| |
 |
 |
| Divided-electrode type FERV (DE-FERV) using MEMS technologies39) |
Conductive polymer electrode type FERV (CP-FERV) using MEMS technologies53) |
|
References
- 62: Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, and Joon-wan Kim: A multi-DOF soft microactuator integrated with flexible electro-rheological microvalves using an alternating pressure source, Smart Materials and Structures, Vol. 30, 085006 (14pp) (2021)
- 59: Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim: A novel bending microactuator with integrated flexible electrorheological microvalves using an alternating pressure source for multi-actuator systems, Microsystem Technologies, Vol. 26, pp. 1507-1519 (2020) [Published online (2019)]
- 58: Joon-Wan Kim, Kazuhiro Yoshida, Toru Ide, and Shinichi Yokota: Fabrication, Experiment, and Simulation of a Flexible Microvalve-Integrated Microarm for Microgrippers Using Electrorheological Fluid, J. of Robotics and Mechatronics, Vol. 32, No. 2, pp. 333-343 (2020)
- 53: Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim: A study on a hybrid structure flexible electro-rheological microvalve for soft microactuators, Microsystem Technologies, Vol. 26, pp. 309-321 (2020) [Published online (2019)]
- 42: Kazuhiro YOSHIDA, Souta HARA, Sang In EOM and Shinichi YOKOTA: A novel soft microgripper using divided-electrode type flexible ER valves, Bulletin of the JSME, Mechanical Engineering J., Vol. 2, No. 6, Paper No. 15-00340 (2015.12), doi: 10.1299/mej.15-00340
- 39: Kazuhiro Yoshida, Noboru Tsukamoto, Joon-Wan Kim, and Sinichi Yokota: A study on a soft microgripper using MEMS-based divided electrode type flexible electro-rheological valves, Mechatronics, Vol. 29, pp. 103-109 (2014.8)
- 35: J.-W. Kim, K. Yoshida, K. Kouda and S. Yokota: A Flexible Electro-Rheological Microvalve (FERV) Based on SU-8 Cantilever Structures and Its Application to Microactuators, Sensors and Actuators A, Vol. 156, Issue 2, pp. 366-372 (2009)
