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AC electroosmosis (ACEO) micropump

When AC voltage is applied to electrodes in a water chamber, the charged particles gather on the electrode surfaces and they form electric double layers (EDLs). The electric field generated by the AC voltage applies Coulomb force on the EDL and generates flows in the chamber. By utilizing the phenomenon called AC electroosmosis (ACEO), simple micropumps without moving parts can be realized.

Working priciple of square pole - slit electrodes ACEO micropump (SS-ACEO-MP) Fabricated SS-ACEO-MP using MEMS technologies (max. 1.6 mm/s)45)
 
Fabricated T-shaped electrode array ACEO micropump (TEA-ACEO-MP) using MEMS technologies Fabricated plate - cylinder electrode array ACEO micropump (PC-ACEO-MP)
References
  • 65: Maho Watanabe, Kazuhiro Yoshida, Joon-wan Kim, Sang In Eom and Shinichi Yokota: Three-dimensional AC electroosmotic micropump with high power density, Journal of Micromechanics and Microengineering, Vol. 33, (2023), 105008 (12pp). DOI: https://doi.org/10.1088/1361-6439/acef31
  • 45: Kazuhiro Yoshida, Tomoyuki Sato, Sang In Eom, Joon-wan Kim, Shinichi Yokota: A study on an AC electroosmotic micropump using a square pole - slit electrode array, Sensors and Actuators A, Vol. 265, pp. 152-160 (2017.8)

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