High power FI micropump
High power FI micropumps have been proposed and developed for micro fluid power sources. The structure of the FI micropump is like a piezoelectric diaphragm pump, but the outlet check valve is replaced by a small diameter pipe. By using the fluid inertia (FI) in the outlet pipe, the FI micropump can generate high output fluid power.
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Working principle of FI micropump |
Fabricated 2.3cm3-sized FI micropump (0.22 W, water) |
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Fabricated 1.3cm3-sized FI micropump (1.5 W, water) |
Fabricated 12mm-diameter in-pipe mobile microrobot (0.9 mm/s) |
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References
- 38: Kazuhiro Yoshida, Tomohisa Muto, Joon-Wan Kim, and Shinichi Yokota: An ER Microactuator with Built-in Pump and Valve, Int. J. of Automation Technology, Vol. 6, No. 4, pp.468-475 (2012. 7)
- 23: T. Seto, K. Takagi, K. Yoshida, J.-H. Park and S. Yokota: Development of High-Power Micropump Using Inertia Effect of Fluid for Small-Sized Fluid Actuators, J. of Robotics and Mechatronics, Vol. 15, No. 2, pp. 128-135 (2003)