Cylindrical-type micromotors using ECF, is proposed and developed (Yokota, Yoshida, Otubo, 1996) (Yokota, Sadamoto, Otubo, 1997)(Yokota, Kondoh, Sadamoto, 2001). The proposed micro motor has simple structure and is driven by a simple electric power supply.
There are two kinds in Cylindrical-type motors, i.e., SE and RE. On the RE-type micro ECF motor, some pairs of electrodes are located on the surface of a cylindrical rotor. The rotor can rotates with the reaction force caused by ECF jets.
In order to investigate on miniaturization characteristics of the Cylindrical ECF motors, SE-type and RE-type ECF motors with ID8mm, 4, 3, etc, are fabricated. Structures of these motors are similar to ID4 motor basically.
In RE-type ID4 motor, maximum rotational speed of 6000rpm is obtained at 6kv of applied voltage with no load. The maximum output power of 1.4mW is also obtained in the ID4 motor.
Fabrication of a micro ECF motor having ID2mm and a micro ECF motor having ID1mm are done and basic characteristics such as rotational velocity are experimentally obtained (Yokota, Hirata, Kondoh, 2001). Figure shows a photocopy of a micro ECF motor with ID2mm and ID1mm. Another figure also shows the structure of the fabricated RE-type ECF micromotor having ID2mm. The total mass of the fabricated ID1mm motor is 50mgf.