研究活動
　ECF MicroMotors 　ECF MicroActuators 　ECF-jets Pumps 　ERF Valves
　ERF MicroValves 　Micro Machine 　MRF Valves 　MRF MicroValves
　Micro Pumps 　Sensors 　Manipulators 　CPS Systems
 
マイクロポンプ
 
　Resonant-driven PZT micro pump 　ECFjet cooling SMAwire-driven micro pump 　Plate-type PZT micro pump
 
SMA-ECF 冷却ポンプ

Micro Pumps for Micro Fluid Power Systems

Fabricated SMA micro pump

Micro pumps play an important role as a micro fluid power source among fluid power micro control systems. SMA has a large energy density, however, the fast temparature control is difficult. To solve the problem, an SMA (Shape Memory Alloy) fine wire-driven micropump using ECF jet forced cooling is proposed and developed, which utilizes jet flows of a new functional fluid ECF (Electro-Conjugate Fluid) produced by the applied DC voltage.
Research Activities
(1) Shinichi YOKOTA, Kazuhiro YOSHIDA, Tomohide KAWAUE, Yasufumi OTSUBO and Kazuya EDAMURA: An SMA-Driven Micropump Using Electro-Conjugate Fluid Jet Cooling; Proc. of the 6th UK Mechatronics Forum International Conference (Mechatronics'98), Sweden, pp.453/458, (1998)
(2) Kazuhiro YOSHIDA, Shinichi YOKOTA, Takeshi OKAYASU, Yasufumi OTSUBO, Kazuya EDAMURA : An 1-cm-cubic-size SMA-Driven Micropump Using ECF Jet Cooling, Proc. of 3rd ISFP'99, Harbin,China, pp.154/159, (1999)

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