研究活動
　ECF MicroMotors 　ECF MicroActuators 　ECF-jets Pumps 　ERF Valves
　ERF MicroValves 　Micro Machine 　MRF Valves 　MRF MicroValves
　Micro Pumps 　Sensors 　Manipulators 　CPS Systems
 
マイクロポンプ
 
　Resonant-driven PZT micro pump 　ECFjet cooling SMAwire-driven micro pump 　Plate-type PZT micro pump
 
共振駆動 PZT ポンプ

Micro Pumps for Micro Fluid Power Systems

Fabricated Resonant-driven PZT micro pump

Micro pumps play an important role as a micro fluid power source among fluid power micro control systems. A piezo-electric micropump using resonance drive is proposed and developed, which realizes high output flowrate with simple structure by using resonance of a bellows pump chamber and mass. Because of the high-frequency of the driving point of the pumps, technical limit is considered as a micro check valve, so high frequency active micro check valves are fabricated. Also, another type pump using pipe inertia is proposed and fabricated.
 
Fabricated Resonant-driven PZT micro pump
Micro Press by making use of the micro pump
A Full-wave Rectifying Piezoelectric Micro Pump
 
Fabricated Resonant-driven PZT micro pump with active check
Fabricated PZT Micropump using inertia effect of pipe
 
Fabricated Resonant-driven PZT micro pump with active checkVer.2
PZT Micropump using inertia effect of pipe
Research Activities
(1) Jun-Ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA : A Piezoelectric Micropump Using Resonance Drive:Proposal of resonance drive amd basic experiments on pump characteristics, Proc. of ASME+IMECE, FPST-Vol4/DSC-Vol.63, Fluid Power Systems and Technology,Dallas, pp77/82, (1997)
(2) Jun-ho PARK, Shinichi YOKOTA, Kazuhiro YOSHIDA : Piezo-electric Micropump Using Resonance Drive, Proc. of 1997 FLOMEKO, Hayama, Vol.1, pp319/324, (1997)
(3) Jung-Ho PARK, Kazuhiro YOSHIDA and Shinichi YOKOTA: Resonantly Driven Piezoelectric Micropump (Fabrication of a micropump with the size less than 1cm3); Proc. of the 6th UK Mechatronics Forum International Conference (Mechatronics'98), September 9-11 Sweden, pp.441/446, (1998)
(4) Jun-Ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA : Resonantly Driven Piezoelectric Micropump (Fabrication of a micropump with the size less than 1cm3),Trans. of Journal of Robotics and Mechatronics, Vol.9 No.07, pp.687/702, (1999)
(5) Jung-Ho PARK, Kazuhiro Yoshida, Yoshihiro Nakasu, Shinichi Yokota, Takeshi Seto, Kunihiko Takagi: A Resonantly-Driven Piezoelectric Micropump for Microfactory, Proc. of ICMT2002, Kitakyushu, pp.417/422, (2002)
(6) Jung-Ho PARK, Kazuhiro Yoshida, Shinichi Yokota: Development of Resonantly-Driven Piezoelectric Micropump and its Application to Micro Press, Proceedings of Actuator 2002, Bremen, Germany, pp.240/243, (2002)
(7) Jun-Ho PARK, Shinichi YOKOTA, Kazuhiro YOSHIDA : A Piezoelectric Micropump Using Resonance Drive with High Power Density, JSME International Journal, Vol.45, No.2, Series C, pp.502/509, (2002)
(8) Jung-Ho PARK, Kazuhiro Yoshida, Shinichi Yokota, Tetuo Seto, K. Takagi: Development of Micro-machines Using Improved Resonantly-Driven Piezoelectric Micro-pump, Proc. of the Fourth International Symposium on Fluid Power Transmission and Control (ISFP’2003), Wuhan, China, pp.536/541, (2003)
(9) Takeshi Seto, Kunihiko Takagi, Kazuhiro Yoshida, Jung-Ho Park, Shinichi Yokota: Development of High-Power Micro-pump Using Inertia Effect of Fluid for Small-Sized Fluid Actuators, the Journal of Robotics and Mechatronics, Vol.15, No.2, pp.128/135, (2003)
(10) Jung-Ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA, Takeshi SETO, Kunihiko TAKAGI, Young-Bog HAM and Sonam YUN: Resonantly-driven Piezoelectric Micropumps Using Active Check Valves, Proc. of ACTUATOR 2004 (9th conf. on New actuators), Bremen, Germany, pp.557/560, (2004)
(11) Kazuhiro YOSHIDA, Yeon-Oh JUNG, Takeshi SETO, Kunihiko TAKAGI, Jung-Ho PARK and Shinichi YOKOTA : A High Output-Power Piezoelectric Micropump Using Inertia of Pipe, ICFP2005, China, pp.394/397, (2005)
(12) Kazuhiro Yoshida, Keita Sugiura, Shinichi Yokota: A Full-wave Rectifying Piezoelectric Micro Fluid Power Source Using Fluid Inertia Effect in Pipes, ICMT06, Mexicocity CD-rom, (2006)

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