研究活動
 
ECF マイクロアクチュエータ
 
 
粒子分散系 ERFバルブ

ネマティック液晶を用いたERFマイクロバルブ

Micro homogenious-type ERF valve by discharge machining

高機能な流体マイクロマシンを実現するため,印加電界強度で粘度を制御でき,分散粒子を含まずマイクロ化に適していると考えられる均一(液晶系えER流体を作動流体とした,固定電極からなり可動部がないマイクロバルブを提案し,半導体プロセスを用いて試作してその特性を実験的に解明している.また、高機能な流体マイクロマシンを実現するため,均一系ER流体を作動流体としたマイクロバルブ,共振駆動形圧電マイクロポンプ,およびベローズ形マイクロアクチュエータを組み合わせた1軸位置制御システムを構築し,その動作を実験的に確認している.

 
Principle of the Homogenious-type ERF valves
Micro homogenious-type ERF valve by MEMS
 
Actuator integrated Micro homogenious-type ERF valve by MEMS for driving a gripper
A micro gripper driven by micro ERF 3-port valve
参考文献
(1) Kazuhiro YOSHIDA, Ken TAKAHASHI, Shinichi YOKOTA, : In-pipe Mobile Micromachine Using Fluid Power Adaptable to Pipe Diameters, Journal of Robotics and Mechatronics, Vol.11, No.5, pp.417/422, (1999)
(2) Kazuhiro YOSHIDA, Ken TAKAHASHI, Shinichi YOKOTA, : In-pipe Mobile Micromachine Using Fluid Power (A Mechanism Adaptable to Pipe Diameters), JSME International Journal, Vol.43, Ser.B, No.1, pp.29/35, (2000)
(3) Jun-ho PARK, Shinichi YOKOTA, Kazuhiro YOSHIDA : Micro Fluid Control System Using Homogeneous ER Fluid (Proposition of micro ER valve and basic experiments), Proc. of FLUCOME, Canada, (2000)
(4) Jun-ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA : Micro ER Valve Using Homogeneous ER Fluid and its Applications to Micro Fluid Control System, Proc. of IECON-2000; 26th Annual Conference of the IEEE Industrial Electronics Society, Nagoya, pp.1809/1814, (2000)
(5) Kazuhiro YOSHIDA, Masaaki KIKUCHI, Jung-Ho PARK, Shinichi YOKOTA : A Micro ER Valve Fabricated by Micromachining, IEEE Micro Electro Mechanical Systems Conference Technical Digest, pp.467/470, (2001)
(6) Kazuhiro YOSHIDA, Jung-Ho PARK, Takayuki SHIMIZU, Shinichi YOKOTA : A Micropump-Mounted In-Pipe Mobile Micromachine Using Homogeneous Electro-Rheological Fluid, Proc. of The 3rd. IFToMM International Micromechanisms Symposium, pp.2/7, (2001)
(7) Kazuhiro YOSHIDA,Masaaki KIKUCHI, Jun-ho PARK, Shinichi YOKOTA : Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments, Journal of Sensors and Actuators, Vol.95/2-3, pp.227/233, (2002)
(8) Kazuhiro YOSHIDA, Takayuki SHIMIZU, and Shinichi YOKOTA: Development of an In-Pipe Mobile Micromachine Using Homogeneous ER Fluid, Proc. of the 1st Taiwan-Japan Workshop on Mechanical and Aerospace Engineering, Vol.3, pp.871/882, (2001)
(9) Kazuhiro Yoshida, Hiroshi Yano, Jung-Ho Park, Shinichi Yokota: A Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid, Proc. of Mechatronics 2002, Holland, pp.725/734, (2002)
(10) Kazuhiro Yoshida, Hiroshi Yano, Jung-Ho Park, Shinichi Yokota: A valve-integrated microactuator using homogeneous electro-rheological fluid, the Journal of Robotics and Mechatronics, Vol.15, No.2, pp.244/250, (2003)
(11) Kazuhiro Yoshida, Hiroshi Yano, Jung-Ho PARK, and Shinichi Yokota: A Valve-integrated Microactuator Using Homogeneous ER Fluid, Proc. of the Fourth International Symposium on Fluid Power Transmission and Control (ISFP’2003), Wuhan, China, pp.542/547, (2003)
(12) Kazuhiro Yoshida, Jung-Ho Park, Hiroshi Yano, Shinichi Yokota and Sonam Yun : A Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid, Journal of Sensors & Materials, Vol.17, No.3, pp.97/112, (2005)

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