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マイクロポンプ

マイクロ流体制御システム用マイクロポンプ

Fabricated Resonant-driven PZT micro pump

管内作業マイクロマシンなどのパワーを要する作業をおこなうマイクロマシンに応用する場合, 搭載可能なサイズで比較的粘度が高いER流体をポンピングできる高出力なマイクロ流体パワー源が必要となる. ここでは, ER流体などの比較的粘度の高い流体をポンピングするためのマイクロ流体パワー源として, PZT共振駆動形、SMA駆動などのマイクロポンプを提案, 試作し, 特性を実験的に明らかにしている.

さらに詳しくは:
PZT共振駆動マイクロポンプ
ECFジェット冷却SMA細線駆動マイクロポンプ
PZT平面蠕動駆動マイクロポンプ
 
Fabricated SMA wire-driven micro pump using ECFjet forced cooling
Fabricated plate-type PZT micro pump for medical injection
参考文献
(1) Jun-Ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA : A Piezoelectric Micropump Using Resonance Drive:Proposal of resonance drive amd basic experiments on pump characteristics, Proc. of ASME+IMECE, FPST-Vol4/DSC-Vol.63, Fluid Power Systems and Technology,Dallas, pp77/82, (1997)
(2) Jun-ho PARK, Shinichi YOKOTA, Kazuhiro YOSHIDA : Piezo-electric Micropump Using Resonance Drive, Proc. of 1997 FLOMEKO, Hayama, Vol.1, pp319/324, (1997)
(3) Jung-Ho PARK, Kazuhiro YOSHIDA and Shinichi YOKOTA: Resonantly Driven Piezoelectric Micropump (Fabrication of a micropump with the size less than 1cm3); Proc. of the 6th UK Mechatronics Forum International Conference (Mechatronics'98), September 9-11 Sweden, pp.441/446, (1998)
(4) Shinichi YOKOTA, Kazuhiro YOSHIDA, Tomohide KAWAUE, Yasufumi OTSUBO and Kazuya EDAMURA: An SMA-Driven Micropump Using Electro-Conjugate Fluid Jet Cooling; Proc. of the 6th UK Mechatronics Forum International Conference (Mechatronics'98), Sweden, pp.453/458, (1998)
(5) Kazuhiro YOSHIDA, Shinichi YOKOTA, Takeshi OKAYASU, Yasufumi OTSUBO, Kazuya EDAMURA : An 1-cm-cubic-size SMA-Driven Micropump Using ECF Jet Cooling, Proc. of 3rd ISFP'99, Harbin,China, pp.154/159, (1999)
(6) Jun-Ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA : Resonantly Driven Piezoelectric Micropump (Fabrication of a micropump with the size less than 1cm3),Trans. of Journal of Robotics and Mechatronics, Vol.9 No.07, pp.687/702, (1999)
(7) Jung-Ho PARK, Kazuhiro Yoshida, Yoshihiro Nakasu, Shinichi Yokota, Takeshi Seto, Kunihiko Takagi: A Resonantly-Driven Piezoelectric Micropump for Microfactory, Proc. of ICMT2002, Kitakyushu, pp.417/422, (2002)
(8) Jung-Ho PARK, Kazuhiro Yoshida, Shinichi Yokota: Development of Resonantly-Driven Piezoelectric Micropump and its Application to Micro Press, Proceedings of Actuator 2002, Bremen, Germany, pp.240/243, (2002)
(9) Jun-Ho PARK, Shinichi YOKOTA, Kazuhiro YOSHIDA : A Piezoelectric Micropump Using Resonance Drive with High Power Density, JSME International Journal, Vol.45, No.2, Series C, pp.502/509, (2002)
(10) Jung-Ho PARK, Kazuhiro Yoshida, Shinichi Yokota, Tetuo Seto, K. Takagi: Development of Micro-machines Using Improved Resonantly-Driven Piezoelectric Micro-pump, Proc. of the Fourth International Symposium on Fluid Power Transmission and Control (ISFP’2003), Wuhan, China, pp.536/541, (2003)
(11) Takeshi Seto, Kunihiko Takagi, Kazuhiro Yoshida, Jung-Ho Park, Shinichi Yokota: Development of High-Power Micro-pump Using Inertia Effect of Fluid for Small-Sized Fluid Actuators, the Journal of Robotics and Mechatronics, Vol.15, No.2, pp.128/135, (2003)
(12) 吉田和弘、鄭 淵午、朴 重濠、横田眞一、瀬戸毅、高城邦彦:管路慣性を応用したマイクロポンプの最適構造、日本機械学会論文集、70巻697号, P.2668/2673, (2004)
(13) Jung-Ho PARK, Kazuhiro Yoshida, Chikara Ishikawa, Shinichi Yokota, Takeshi Seto, Kunihiro Takagi: A Study on High-Output Resonance-driven Piezoelectric Micopumps Using Active Check Valves, the Journal of Robotics and Mechatronics, Vol.16, No.2, pp.171/177, (2004)

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