フレキシブルERマイクロバルブ（FERV）
電界による粘度変化でERFの流れを制御するフレキシブルERマイクロバルブ（FERV）を提案，MEMS技術などを用いて試作し，ソフトマイクログリッパなどへの応用を図っています．
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| Soft ER microgrpper |
Soft microgriper using FERVs fabricated by machining42) |
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| Divided-electrode type FERV (DE-FERV) using MEMS technologies39) |
Conductive polymer electrode type FERV (CP-FERV) using MEMS technologies53) |
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参考文献
- 62: Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, and Joon-wan Kim: A multi-DOF soft microactuator integrated with flexible electro-rheological microvalves using an alternating pressure source, Smart Materials and Structures, Vol. 30, 085006 (14pp) (2021)
- 59: Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim: A novel bending microactuator with integrated flexible electrorheological microvalves using an alternating pressure source for multi-actuator systems, Microsystem Technologies, Vol. 26, pp. 1507-1519 (2020) [Published online (2019)]
- 58: Joon-Wan Kim, Kazuhiro Yoshida, Toru Ide, and Shinichi Yokota: Fabrication, Experiment, and Simulation of a Flexible Microvalve-Integrated Microarm for Microgrippers Using Electrorheological Fluid, J. of Robotics and Mechatronics, Vol. 32, No. 2, pp. 333-343 (2020)
- 53: Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim: A study on a hybrid structure flexible electro-rheological microvalve for soft microactuators, Microsystem Technologies, Vol. 26, pp. 309-321 (2020) [Published online (2019)]
- 42: Kazuhiro YOSHIDA, Souta HARA, Sang In EOM and Shinichi YOKOTA: A novel soft microgripper using divided-electrode type flexible ER valves, Bulletin of the JSME, Mechanical Engineering J., Vol. 2, No. 6, Paper No. 15-00340 (2015.12), doi: 10.1299/mej.15-00340
- 39: Kazuhiro Yoshida, Noboru Tsukamoto, Joon-Wan Kim, and Sinichi Yokota: A study on a soft microgripper using MEMS-based divided electrode type flexible electro-rheological valves, Mechatronics, Vol. 29, pp. 103-109 (2014.8)
- 35: J.-W. Kim, K. Yoshida, K. Kouda and S. Yokota: A Flexible Electro-Rheological Microvalve (FERV) Based on SU-8 Cantilever Structures and Its Application to Microactuators, Sensors and Actuators A, Vol. 156, Issue 2, pp. 366-372 (2009)
- 34: 吉田, 小木曽, 横田: 均一系ER流体を用いたフレキシブルERマイクロアクチュエータ, 日本機械学会論文集（C編）, Vol. 73, No. 733, pp. 2508-2513 (2007)
